HITACHI S-2500 SCANNING ELECTRN MICROSCOPE

FEATURES

• Accelerating voltages: O.5-30 kV
• Resolution: 2.5 nm in high resolution mode
• Maximum magnification: 200,000
• LaB6 filament
• 2 condenser lenses
• Electron detectors
  • 2 secondary electron (scintillator-photomultiplier) detectors
    • Lower detector mounted below objective lens
    • Upper detector mounted above objective lens

      For high resolution of small samples, specimen is inserted into objective lens and upper detector is used to generate image.

  • Backscattered electron (solid state) detector mounted around objective lens

Transmitted electron detector mounted below specimen

• Dynamic focus
• Tilt correction
• Gamma control
• Split screen
• Dual magnification
• Automatic data display
• Polaroid camera
• Ion pump for electron gun
• Oil diffusion pump for column
• Closed recirculating water chiller to cool diffusion pump

• Noran 5400 energy dispersive x-ray microanalysis system
  • Ultrathin window light element detector
• Noran 8500 image analysis system
• Fisons Polaron E7 400 cryotrans system

OPERATING INSTRUCTIONS

To turn on microscope

• Microscope is left on unless microscope is malfunctioning or there is a power failure
• If off, turn on EVAC POWER switch on the microscope column console.
• Turn on DISPLAY switch.
• If not depressed, press the EVAC/AIR switch on the evacuating system panel.
• Wait until green HIGH light on evacuating system panel and green HIGH VAC light on GUN AIRLOCK VALVE are illuminated.
• Open GUN AIRLOCK VALVE
  • Turn gun valve handle 90° until oriented in free direction.
  • Pull out until it stops.
  • Turn back 90° until oriented in lock direction (2 white rings will be visible).

To leave microscope

• Press ACC VOLTAGE OFF switch to turn off high voltage.
• Close the GUN AIRLOCK VALVE on column.
• Set each control knob of specimen goniometer stage to the specimen exchange position.
  • X: 17
  • Y: 20
  • T: Around 0
  • Z: EX or lowest possible position
• Release EVAC/AIR by pressing switch to admit air into specimen chamber.
• Pull out specimen stage and remove the specimen stub.
• Push in specimen stage.
• Press EVAC/AIR switch to depressed position.

To turn off microscope

• Microscope is left on unless microscope is malfunctioning or there is a power failure.
• If on, press ACC VOLTAGE OFF switch to turn off high voltage.
• Close the GUN AIRLOCK VALVE on column.
• Turn off DISPLAY POWER switch on main unit.
• Check that VACUUM HIGH light is illuminated.
• Turn off EVAC POWER switch.

To exchange specimen

• If accelerating voltage is on, press ACC VOLTAGE OFF switch.
• Close GUN AIRLOCK VALVE on column.
  • Turn gun valve handle 90o until oriented in free direction.
  • Push in until it stops.
  • Turn back 90° until oriented in lock direction (1 white ring will be visible).
• Set each control knob of specimen goniometer stage to the specimen exchange position.
  • X: 17 Y: 20
  • T: Around 0
  • Z: EX or lowest possble position
  • The SC AIR POSSIBLE light will be lit green when the control knobs are set in the exchange position.
• Release EVAC/AIR by pressing switch to admit air into specimen chamber.
• Pull out specimen stage.
• Remove the specimen holder if necessary.
• Remove specimen stub from specimen holder.
• Place specimen stub in specimen holder.
• If removed, place specimen holder on specimen stage.
• Push in specimen stage.
• Press EVAC/AIR switch to depressed position.
• Wait until green HIGH light on evacuating system panel and green HIGH VAC light on GUN AIRLOCK VALVE are illuminated.
• Open GUN AIRLOCK VALVE
  • Turn gun valve handle 90° until oriented in free direction.
  • Pull out until it stops.
  • Turn back 90° until oriented in lock direction (2 white rings will be visible).

 

To observe image

• Make sure that signal SELECTOR switches 1 and 2 are set to SE.
• Set STAGE and SED (secondary electron detector )switches according to working distance.

• Set COND LENS (condenser lens) 2 knob to appropriate setting.

• Check READY light. If lit, press ACC VOLTAGE ON switch.
• If image is not visible:
  • Check emission current. If no emission current, ask for help.
  • If emission current meter indicates emission current flowing:
    • Reduce magnification to a low magnification by pressing MAGNIFICATION DOWN switch.
    • Press SEARCH switch.
    • Adjust COARSE FOCUS knob so that CRT waveform changes from line without peaks to line with several peaks.
    • Press SEARCH switch again.
• With AUTO-MAN-INV switch set at MAN, adjust image brightness and contrast with BRIGHTNESS and CONTRAST knobs.
• Press AUTO/MONIT switch to activate AUTO.
• Turn COARSE FOCUS knob or press AUTO FOCUS switch to focus image.
  • If image profile can be seen, press AUTO switch.
  • If image profile cannot be seen, press SEARCH and AUTO.
• At low or intermediate magnification, move specimen stage to select desired area of specimen.
• Select desired magnification by pressing MAGNIFICATION UP and DOWN switches. If desired, set PRESET magnification with keyboard. Microscope will go to preselected low magnification when PRESET 1 switch is pressed and to preselected high magnification when PRESET 2 switch is pressed.
• At high magnification, adjust area of specimen in field of view with IMAGE SHIFT X and Y knobs.

To correct astigmatism

• Press the AUTO STIGMA switch.
• If AUTO STIGMA switch does not correct astigmatism:
  • Turn X and Y knobs until astigmatism is corrected.
  • If astigmatism cannot be corrected with the X and Y knobs
    • Set magnification to 3000 - 4000.
    • Press STIGMA MONIT RESET switch. Cross mark will appear.
    • Focus image with COARSE and FINE FOCUS controls.
    • Adjust the STIGMA X and Y knobs so that focused location in the image coincides with the crossover point of the cross mark.
    • Press MONIT RESET switch .

To change objective aperture

• Move aperture control on column into desired notch.

• Align aperture with X and Y alignment knobs on aperture control.
• Correct for astigmatism.

To operate raster rotation unit

• Turn RASTER ROTATION switch to ON.
• Turn TILT switch to ON.
• Turn DYNAMIC FOCUS switch to ON.
• Rotate and/or tilt specimen image to obtain desired view.
• Focus center of image with coarse and fine FOCUS controls.
• Focus edges with DYNAMIC FOCUS control.
• Turn all switches on unit to off when unit is not in use.

To activate keyboard

• Press call key
• Press key number corresponding to desired function.
• Enter desired change and press enter.
• When changes are complete, press enter to return to normal image observation.

To display data

• Press DATA DISPLAY switch until desired light is illuminated.
• ON light illuminated: data displayed in bottommost area of CRT
  • Data from left to right:
    • Micrograph number
  • Accelerating voltage
  • Magnification
  • Length of micron marker
  • Enlarging ratio used in dual mag mode
  • Marks (n) above data: Micron marker
• ON light extinguished: data not displayed
• KEY-IN light illuminated: characters may be entered with keyboard at location of * cursor. With shift key set to function:

To photograph image

• With AUTO-MAN-INV switch at MAN, press AUTO/MONIT switch.
• Adjust BRIGHTNESS and CONTRAST knobs so that waveform on CRT appears within the central zone with brightness lower.
• Press AUTO/MONIT switch to resume normal image mode.
• Turn AUTO-MAN-INV switch to AUTO.
• With camera arm in L position, insert film in film holder and withdraw film packet.
• Press PHOTO switch. PHOTO light is illuminated during exposure.
• When buzzer sounds and usual image returns to CRT, reinsert film packet into camera.
• Move camera arm to P position.
• With even, steady movement, pull film packet from camera to edge of film.
• Move camera arm to L position and pull film completely out of holder.
• Wait 20 sec.
• Remove print and negative from envelope.
• Coat print with fixer.
• Place negative in water until ready to develop.

Split screen mode

• Press NORMAL/SPLIT switch.
• Select image signal for top section by SIGNAL SELECTOR switch 1.
• Select image signal for bottom section by SIGNAL SELECTOR switch 2.
• For simultaneous display of a low magnification on the bottom section and enlargement of selected area on top, use MODE/DUAL MAG unit.
• To return to usual image, press NORMAL/SPLIT switch again.

Ultrahigh resolution position

• Ultrahigh resolution
  • Maximum specimen size: 6 mm diameter
  • Working distance: -3 to 0 mm
  • Secondary electron detector: upper
  • Maximum displacement range for stage: ±2.5 mm on X and Y axes
  • Magnification: ³500.
  • Circumference of image blurs at lower magnifications.
• Set each control knob of specimen goniometer stage to the specimen exchange position.
  • X: 17 Y: 20
  • T: Around 0
  • Z: EX
• Confirm that SC AIR POSSIBLE light is illuminated.
• Release EVAC/AIR by pressing switch to admit air into specimen chamber.
• Pull out specimen stage and remove the specimen holder.
• Mount specimen holder and specimen set for ultrahigh resolution.
  • Specimen stub: 6 mm diameter
  • Height of specimen holder with stub and specimen: 39 mm
• Turn on PROTECTION switch on specimen stage. PROTECTION light will be illuminated.
• If the X and/or Y DIRECTION INDICATOR lights are illuminated, turn the X and/or Y control knobs on specimen stage in direction of arrow marked below the illuminated light until all lights are extinguished.
• Press specimen stage into specimen chamber.
• Press EVAC/AIR switch to depressed position.
• Wait until green HIGH light on evacuating system panel and green HIGH VAC light on GUN AIRLOCK VALVE are illuminated.
• Set the Z control knob on specimen stage to 5 mm.
• Buzzer will sound if X or Y control knob on specimen stage is allowable displacement range on X or Y axis is exceeded.

Robinson backscattered detector

• Vent specimen chamber and pull out specimen stage.
• Bring the detector fully into the IN position by depressing adjustment knob on top of detector and rotating counter-clockwise.
• Lower the specimen stage to the position where the specimen does not hit the detector with Z control (working distance control).
• Close specimen chamber and evacuate column. Select the appropriate SEM accelerating voltage.
• Check READY light. If lit, press ACC VOLTAGE ON switch.
• Select EXT setting on the SELECTOR with number 1 switch.
• Set ROBINSON DETECTOR CONTROL MODULE controls as follows:
  • MAINS: off
  • CONTRAST: fully counter-colckwise
  • BRIGHTNESS: mid-range
• Turn mains ON on the MODULE.
• Turn CONTRAST control clockwise untill the image is readily visable.
• When finished, turn controls to starting positions listed above.
• Press ACC VOLTAGE OFF switch.
• Vent the column.
• Pull out specimen chamber.
• After removing the sample from the stage, move the Robinson detector out of the way by pressing the adjustment knob down and twisting clockwise untill it stops.
• Close specimen chamber and evacuate the column.

GW transmitted electron detector

• Exchange two cables marked with green tape in position EXT on the back of the SEM from the cable marked BE (backscattered electron detector normally connected) to the cable marked STEM (transmitted electron detector).
• Vent specimen chamber and pull out specimen stage.
• Insert the detector into stage ( this detector is stored in a box ).
• Place the specimen holder containing a specimen(s) mounted on a standard 3- mm TEM grid in the detector head.
• Close specimen chamber and evacuate the specimen chamber.
• Select the appropriate SEM accelerating voltage.
• Check READY light. If lit, press ACC VOLTAGE ON switch.
• Obtain a secondary image of the grid at low magnification.
• Obtain an image of sample with controls on specimen current amplifier unit (vertical panel ) on the SEM.
• When finished, turn RANGE on panel to OFF.
• Press ACC VOLTAGE OFF switch.
• Vent the column.
• Pull out specimen chamber.
• Remove detector from stage.
• Remove specimen from detector and place detector in storage box.
• Close specimen chamber and evacuate the column.
• Exchange two cables marked with green tape in position EXT on the back of the SEM from the cable marked STEM to cable marked BE.