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Hybrid CVD/PLD deposition system (Bert) |
| This high vacuum system combines chemical vapor deposition and pulsed laser deposition in an environment that allows the transfer of samples under high vacuum between CVD and PLD.
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| More...(link coming soon) |
Location: 1050 Bevill |
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Multi-target confocal deposition system I (Rascal) |
| This ultra-high vacuum system has two clusters of four 1.5" AJA UHV magnetron guns. Up to 1" x 1" samples are transferred through a load lock. The sample can be heated during deposition to 700°C.
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| More...(link coming soon) |
Location: 1064 Bevill |
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Multi-target confocal deposition system II (Adam) |
| This ultra-high vacuum system has four 1.5" AJA UHV magnetron guns in a confocal arrangement. Up to 2" x 2" samples are transferred through a load lock. The sample is continuosly rotated during deposition and it can be heated during deposition to 700°C. |
| More...(link coming soon) |
Location: 1064 Bevill |
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Four-target, twelve-station deposition system (Key) |
| This high vacuum system has four 2" magnetron sputtering guns and a sample carousel that holds up to twelve separate 2" diameter sample platens.
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| More...(link coming soon) |
Location: 0006 Bevill |
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Three-target, fast-turn-around deposition system (Shirley) |
| This high vacuum system has three 1.5" magnetron sputtering guns (2 DC and 1 RF) with rapid turn around (~4 hours) for two samples at a time.
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| More...(link coming soon) |
Location: 0006 Bevill |
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High-temperature magnetic annelaer (Minimag) |
| This medium vacuum system enables annealing of a 2" wafer at a maximum temperature of 600°C in a magnetic field of 1 T. The user can select in-plane or perpendicular-to-the-plane magnetic field orientation. |
| More...(link coming soon) |
Location: 0006 Bevill |
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Magneto-optic Kerr system (MOKE) |
| This is a standard Kerr hystersis loop measurement system with polar or longitudinal field and variable angle of incidence. We are currently redesigning the magnet and we'll add variable temperature soon.
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| More...(link coming soon) |
Location: 2065 Bevill |
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| More...(link coming soon) |
Location: xxxx Bevill |
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