AES, SEM and SAM
A diagram of the AES/SAM/SEM instrumentation of Axis 165 is shown below. The sub-micron electron source is used to obtain a magnified image of the sample by scanning the beam across its surface. Secondary electrons generated by the interaction of this beam with the sample are detected by the scintillator-photomultiplier detector (SED), amplified and routed through a framestore allowing a processed or raw image to be displayed on a monitor. Similarly, Auger electrons produced by the action of the scanning electron beam can be energy analyzed, and a selected energy used to modulate a display, producing an element map of the sample.
Below is an SEM image of a fracture surface of a turbine blade. An AES spectrum (shown as a derivative plot) is easily obtained in the mapped area.
A map of the Si KLL Auger line for
the SiO2 pattern on an integrated circuit is shown below.